Structural Assessment of (Sub-)Monolayer Coatings in Device Processing at High Spatial Resolving Power by TOF-SIMS Tandem MS Imaging — ASN Events

Structural Assessment of (Sub-)Monolayer Coatings in Device Processing at High Spatial Resolving Power by TOF-SIMS Tandem MS Imaging (116289)

Jacob Schmidt 1
  1. Physical Electronics, CHANHASSEN, MN, United States