Internal Structure Observation of Heat-Sensitive Materials using Cooling Planar Surface Milling — ASN Events
  1. Schedule
  2. ID11 - Emerging New Technologies & Techniques Development (Afternoon)
  3. Internal Structure Observation of Heat-Sensitive Materials using Cooling Planar Surface Milling

Internal Structure Observation of Heat-Sensitive Materials using Cooling Planar Surface Milling (114525)

Tamae Omoto 1 , Jun Watanabe 1 , Tatsuhito Kimura 1
  1. JEOL Ltd., Akishima, TOKYO, Japan