TEM observation of mirror-microscopy detected epitaxial SiC defects and dynamic structural transitions using an FIB compatible MEMS specimen heating holder

TEM observation of mirror-microscopy detected epitaxial SiC defects and dynamic structural transitions using an FIB compatible MEMS specimen heating holder

TEM observation of mirror-microscopy detected epitaxial SiC defects and dynamic structural transitions using an FIB compatible MEMS specimen heating holder (114356)

Hiroki Kawamoto ¹ , Yasushi Kuroda ¹ , Keitaro Wtanabe ¹ , Toshie Yaguchi ¹ , Yasuhira Nagakubo ¹ , Kenji Kobayashi ¹ , Takeshi Kobayashi ¹ , Hiroaki Matsumoto ¹ , Hiromi Inada ¹

Hitachi High-Tech Corporation, Hitachinaka-shi, IBARAKI-KEN, Japan

Authors contributing to this presentation.

Kawamoto, H

After earning a Ph.D. in Plant Morphology from the University of Tokyo, Hiroki kawamoto has been actively involved in the reseach and development of electron microscopes at Hitachi High-Tech.

TEM observation of mirror-microscopy detected epitaxial SiC defects and dynamic structural transitions using an FIB compatible MEMS specimen heating holder (114356)

Kawamoto, H

Kuroda, Y

Wtanabe, K

Yaguchi, T

Nagakubo, Y

Kobayashi, K

Kobayashi, T

Matsumoto, H

Inada, H

TEM observation of mirror-microscopy detected epitaxial SiC defects and dynamic structural transitions using an FIB compatible MEMS specimen heating holder (114356)

Add notes

Kawamoto, H

Kuroda, Y

Wtanabe, K

Yaguchi, T

Nagakubo, Y

Kobayashi, K

Kobayashi, T

Matsumoto, H

Inada, H

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