The FIB-SEM Microscope with an Integrated fs-laser for the Atom Probe Tomography (APT) and (scanning) Transmission Electron Microscopy (TEM/STEM) Sample Preparation — ASN Events
  1. Schedule
  2. Physical Sciences Poster Session
  3. The FIB-SEM Microscope with an Integrated fs-laser for the Atom Probe Tomography (APT) and (scanning) Transmission Electron Microscopy (TEM/STEM) Sample Preparation

The FIB-SEM Microscope with an Integrated fs-laser for the Atom Probe Tomography (APT) and (scanning) Transmission Electron Microscopy (TEM/STEM) Sample Preparation (114384)

Feng Lin Ng 1 , Olena Vertsanova 2 3 , Martina Heller 2 , Kasem Bau 1 , Bernd Schulz 4
  1. Carl Zeiss Pte. Ltd, Singapore, SINGAPORE
  2. Carl Zeiss Microscopy GmbH, Oberkochen
  3. Microelectronics Department, National Technical University of Ukraine , Kyiv
  4. Carl Zeiss Pty Ltd, Australia