Full-Field Illumination Ptychography Using a Structured Electron Beam — ASN Events

Full-Field Illumination Ptychography Using a Structured Electron Beam (114624)

Hirokazu Tamaki 1 , Koh Saitoh 2
  1. Research & Development Group, Hitachi, Ltd., Kokubunji, Tokyo, Japan
  2. Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, Aichi, Japan